USPTO Patents Application 10517063

(19)

JAPANESE PATENT OFFICE

PATENT ABSTRACTS OF JAPAN

(11) Publication number: 09085045 A
(43) Date of publication of application: 31.03.97

(51) Int. CI B01D 53/68
B01D 53/34
B01D 53/54

(21) Application number 07274821

(22) Date of filing: 27.09.95 '

(71) Applicant: KANKEN TECHNO KK SEIKA

HIGHTECHrKK

(72) Inventor: IMAMURA KEIJI

TSUCHIYA HIROO

(54) METHOD FOR DETOXIFYING NF3 EXHAUST GAS

AND APPARATUS THEREFOR

(57) Abstract:

PROBLEM TO BE SOLVED: To safely and efficiently
detoxify NF^ gas so as not to generate environmental

pollution by adding water and ammonia gas to a gas
containing NF^ to react them with NF^ to decompose NF^

to nitrogen and hydrogen fluoride and neutralizing and
detoxifying formed hydrogen fluoride as an ammonium
salt.

SOLUTION: The NF^-containing exhaust gas from an

exhaust gas inflow pipe 1 is diluted with the nitrogen gas
from an inflow pipe 11 to be introduced into an inlet

scrubber 8 and water is sprayed from above to add v^f^ter
to the exhaust gas and ammonia gas is added to the
exhaust gas from an NH^ inflow pipe 6 and this exhaust

gas is heated by a heater element 5 in a reaction part 2
and NFg and water are reacted to be reduced and

decomposed to NOx and hydrogen fluoride. NOx and
hydrogen fluoride are further reacted with ammonia to be
decomposed and neutralized to N^, H^O and amrrionium

fluoride. This heated and decomposed exhaust gas is
succeedingly introduced into an outlet scrubber 9 to be
washed *with water and a water-soluble component
inclusive ammonia fluoride is absorbed, removed and
detoxified to be discharged from an exhaust pipe 4.

COPYRIGHT: (C)1997.JPO

I

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